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3-62 Agilent B1500A/B1505A Programming Guide, Edition 11
Programming Examples
Quasi-static CV Measurements
A program example of quasi-static CV measurement is shown below. This example
measures the gate capacitance of MOSFET. This program example uses three SMUs
directly connected to the DUT and a SMU connected to the DUT through the
SMU/CMU unify unit (SCUU).
Table 3-17 Quasi-static CV Measurement Example
Sub perform_meas(ByVal session As IMessage, ByVal t() As Integer) ’1
Dim i As Integer = 0 ’t(0): Drain
Dim j As Integer = 0 ’t(1): Gate
Dim nop1 As Integer = 1 ’t(2): Source
Dim nop2 As Integer = 1 ’t(3): Substrate
Dim value As String = "Vg (V), Cgb (pF), C-status, Ileak (pA), I-status, Time
(sec)"
Dim fname As String = "C:\Agilent\prog_ex\data21.txt"
Dim title As String = "QSCV Measurement Result"
Dim msg As String = "No error."
Dim err As Integer = 0
Dim vg1 As Double = 3.2 ’12
Dim vg2 As Double = -7.2
Dim vstep As Double = 0.2
Dim gstep As Integer = Math.Round(Math.Abs(vg2 - vg1) / Math.Abs(vstep)) - 1
Dim cvoltage As Double = 0.25
Dim icomp As Double = 0.1
Dim swp As Integer = 1
Dim hold As Double = 5
Dim delay1 As Double = 0.0
Dim delay2 As Double = 0.0
Dim cinteg As Double = 0.1
Dim linteg As Double = 0.1
Dim range As Integer = -10
nop1 = gstep
Dim data(nop2-1, nop1-1) As String ’26
Dim rep As Integer
Dim mret As String
Dim sc(nop1) As Double
Dim md1(nop1) As Double
Dim st1(nop1) As String
Dim md2(nop1) As Double
Dim st2(nop1) As String
Dim tm(nop1) As Double ’34
Line Description
2 to 10 Declares variables used through the project. And sets the proper values.
12 to 25 Declares variables used to set the source output, and sets the value.
26 to 34 Declares variables used to read the measurement data.
- Agilent B1500A/B1505A 1
- Manual Part Number 2
- Warranty 2
- Technol o gy Licenses 2
- Restricted Rights Legend 2
- For B1500A Users 3
- For B1505A Users 3
- In This Manual 4
- Contents 10
- 1 Programming Basics 19
- 10 ASSIGN @B1500 TO 717 20
- Before Starting 21
- FlexGUI Window 22
- Settings dialog box 24
- Getting Started 25
- To Reset the Agilent B1500 26
- To Read Query Response 26
- To Perform Self-Test 26
- To Perform Self-Calibration 26
- To Perform Diagnostics 27
- To Force Voltage/Current 30
- To Set the Measurement Range 32
- To Pause Command Execution 33
- To Start Measurement 33
- To F orce 0 V 33
- To Control ASU 34
- To Control SCUU 35
- To Read Error Code/Message 36
- To Read Spot Measurement Data 36
- To Read Time Stamp Data 38
- Alpha Character 40
- (A to Z, a to z) 40
- Numeric Data 41
- Terminator 42
- Special Terminator 42
- Separator 42
- Data Output Format 43
- ASCII Data Output Format 44
- Data Format 45
- Data Elements 48
- Binary Data Output Format 54
- Data Resolution 55
- Byte 1 Byte 2 Byte 3 Byte 4 59
- AB C D E F 59
- 8 Bytes Data Elements 66
- GPIB Interface Capability 73
- Status Byte 74
- Programming Tips 76
- To Confirm the Operation 77
- GOC, SOC 84
- Programming Basics 86
- 2 Remote Mode Functions 87
- Measurement Modes 89
- Voltage or current 100
- Binary Search Measurements 106
- Linear Search Measurements 108
- Sampling Measurements 110
- Quasi-static CV Measurements 113
- Capacitance Data 115
- Spot C Measurements 116
- Pulsed Spot C Measurements 117
- Pulsed Sweep CV Measurements 122
- C-f Sweep Measurements 124
- AC signal level 126
- C-t Sampling Measurements 128
- Synchronous Output 130
- Automatic Abort Function 132
- Parallel Measurement Function 134
- Program Memory 135
- Dual HCSMU 138
- SPGU Module 139
- SPGU DC bias output 140
- SPGU Channel Status 140
- PG Operation Mode 141
- Remote Mode Functions 143
- ALWG Operation Mode 145
- Module Selector 150
- External Relay Control Output 151
- SMU/PG Selector 152
- HVSMU force is 154
- connected to 154
- HVSMU Current Expander 155
- Ultra High Voltage Expander 156
- Digital I/O Port 157
- Accessories 158
- Digital I/O Internal Circuit 159
- Trigger Function 160
- Trigger Input 161
- Trigger Output 163
- Using Trigger Function 166
- To Send Trigger Using OS/OSX 167
- Start measurement 168
- Measurement completion 168
- Ext Trig In 168
- Ext Trig Out 168
- Hold time 171
- Delay time or more 171
- Step delay time or more 171
- Source trigger delay 171
- Measurement trigger delay 171
- Trig In/Out Internal Circuit 172
- Initial Settings 173
- 3 Programming Examples 179
- About Example Program Code 181
- To Start Program 181
- To Create Measurement Program 183
- High-Speed Spot Measurements 187
- Spot Measurements 190
- Pulsed Spot Measurements 193
- Staircase Sweep Measurements 196
- Pulsed Sweep Measurements 206
- ," & igcomp 218
- Programming Examples 238
- Measurement 238
- Result Example 238
- Data save completed 248
- Using Program Memory 290
- Tips to use program memory 291
- Reading Time Stamp Data 308
- Reading Binary Output Data 309
- Using Programs for 4142B 312
- 4 Command Reference 317
- Command Summary 319
- Sets the timing parameters 326
- Command Parameters 331
- Before using 1 pA range 334
- Output ranging 337
- 50 Ω range 347
- 300 kΩ range 347
- Command Reference 348
- . This function is 360
- ,abort[,post] 367
- CORRSER? 382
- ,corr,state 385
- ,corr,mode,primary,secondary 386
- DSMPLARM 390
- DSMPLFLUSH 391
- DSMPLSETUP 392
- ERHVCTST? 402
- [,option] 405
- ERPFTEMP? 413
- ERPFUHCA 413
- ERPFUHCA? 414
- ERPFUHCCAL? 414
- ERPFUHCMAX? 414
- ERPFUHCTST? 415
- INTLKVTH 425
- INTLKVTH? 425
- [,Vcomp]] 433
- [,Icomp]] or 433
- for the 481
- Example 482
- To use ASU 487
- To use SCUU 501
- 5 Error Messages 555
- Operation Error 557
- Self-test/Calibration Error 584
- 3465 IM short test failed 588
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