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Impedance Measurement Accuracy at Four-Terminal Pair Port

Equation 1 shows the impedance measurement accuracy [%] at four-terminal

pair port of the Agilent 4294A, or measurement port of the 16048G/16048H.

Equation 1. Impedance Measurement Accuracy [%] at Four-Terminal Pair Port

Where,

' = E

+ E

PBW

+ E

POSC

+ E

[%]

' = Y

+ K

 Ky

OSC

 (Y

ODC

+ Y

) [S]

' = Z

+ K

 Kz

OSC

 Z

[Ω]

, E

, Z

: See Figure 3 on page 17.

posc

[%] =

at oscillator level >500 mV

at oscillator level >250 mV,

≤500 mV

at oscillator level >125 mV,

≤250 mV

at oscillator level >64 mV,

≤125 mV

at oscillator level ≤64 mV

osc

at oscillator level >500 mV 1000

at oscillator level ≤500 mV 500

osc

at oscillator level >500 mV 2

at oscillator level >250 mV, 500

≤500 mV V

at oscillator level >125 mV, 250

≤250 mV V

at oscillator level >64 mV, 125

≤125 mV V

at oscillator level ≤64 mV 64

E = E

' +

(

+ Y

)

 100

0.03 

(

1000

– 1

)

100

0.03 

(

500

– 1

)

0.03 

(

250

– 1

)

0.03 

(

125

– 1

)

 (0.03 + E

PBW

)

(

– 1

)

1 2 ... 5 6 7 8 9 10 11 12 13 14 15 ... 31 32

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