Agilent Technologies Agilent E5250A Manual do Utilizador descarregar pdf (Página 6)

Capacitance Calculation Accuracy (Supplemental Data)

Accuracy is derived from the current range, voltage range, capacitance measure-

ment and leakage current measurement integration times, and the guard capaci-

tance of cabling and step voltage. The information in the chart below is based on

the following conditions: Voltage Range ±20V; Voltage Step: 100mV; Guard

Capacitance : 100pF; Equivalent parallel resistance of DUT: 1 ´ 10

W. The ratio

of integration times for capacitance measurement and leakage current measure-

ment is 1:1.

HRSMU

Current Integration Max. Meas. Accuracy

Range Time Value Resolution Reading % Offset

0.5sec 100pF/1pF 5fF 4.2 70fF

10pA/

1sec 2pF/20pF 10fF 4.3 90fF

100pA

2sec 76pF/760pF 20fF 4.3 130fF

0.1sec 700pF 10fF 0.84 160fF

1nA 0.5sec 4.5nF 40fF 0.85 280fF

2sec 18nF 200fF 0.93 740fF

0.1sec 7nF 10fF 0.84 200fF

10nA

0.5sec 45nF 40fF 0.85 440fF

2sec 180nF 200fF 0.93 1.4pF

10sec 940nF 1pF 1.3 6.2pF

MPSMU

Integration Max. Meas. Accuracy

Current Time Value Resolution Reading % Offset

0.1sec 700pF 10fF 0.91 170fF

1nA 0.5sec 4.5nF 40fF 0.94 340fF

2sec 18nF 200fF 1.0 1pF

0.1sec 7nF 10fF 0.91 180fF

10nA 0.5sec 45nF 40fF 0.94 480fF

2sec 180nF 200fF 1.0 1.6pF

10sec 940nF 1pF 1.6 7.6pF

Current complicance must be smaller than the current range. The capacitance of

the DUT and measurement path must be smaller than the maximum measurement

value.

Functions

Measurement Setup

Setting

•

Fill-in-the-blanks using front-panel or

full-size external keyboard

•

Load settings from floppy disk or via

the LAN port

•

Program using internal Instrument

BASIC or via GPIB

•

HELP Function

•

Library: Default measure setup, Vce-

Ic, Vds-Id, Vgs-Id, and Vf-If are pre-

defined softkeys

•

User-defined measurement setup

library

•

Auto file load function on power-up

Measurement

The 4155C and 4156C can

perform dc or pulsed force/measure,

and stress force. For dc, voltage/

current sweep and sampling (time

domain) measurements are available.

Voltage/Current Sweep

Measurement Characteristics

Each SMU and VSU can sweep using

VAR1 (primary sweep), VAR2

(subordinate sweep), or VAR1

(synchronous sweep).

VAR1

Primary sweep controls the staircase

(dc or pulsed) voltage or current

sweep.

Maximum number of steps: 1001 for

one VAR1 sweep.

Sweep type: linear or logarithmic

Sweep direction: Single or double sweep

Hold time: Initial wait time or wait

time after VAR2 is set: 0 to 655.35s

with 10ms resolution

Delay time: Wait time from VAR1 step

to the start of the measurement: 0 to

65.535s with 100µs resolution

VAR2

Subordinate linear staircase or linear

pulsed sweep. After primary sweep is

completed, the VAR2 unit output is

incremented.

Maximum number of steps: 128

VAR1

Staircase or pulse sweep synchronized

with the VAR1 sweep. Sweep is made

with a user specified ratio and offset

value. VAR1 output is calculated as

VAR1 = a ´ VAR1 + b, where “a” is the

user specified ratio and “b” is the user

specified offset value.

CONSTANT

A source unit can be set as a constant

voltage or current source depending on

the unit.

PULSE

One of the SMUs can be set as a pulse

source.

Pulse width: 0.5ms to 100ms, 100µs

resolution.

Pulse period: 5ms to 1s (³pulse width +

4ms), 100µs resolution.

SMU pulse setting accuracy (supple-

mental information, at fixed range

measurement except multichannel

measurement):

Width: 0.5% + 50µs

Period: 0.5% + 100µs

Trigger output delay for pulsed

measurement: 0 - 32.7ms with 100µs

resolution (< pulse width).

Sampling (Time Domain)

Measurement Characteristics

Displays the time sampled voltage/

current data versus time.

Max. sampling points: 10,001 (linear)

Sampling mode: linear, log, and

thinned-out

Note: The thinned-out mode is similar to

reverse-log sampling. Sampling measurement

continues by thinning out older data until the

sampling completion condition is satisfied.

Sampling interval range and resolution:

Linear scale (auto mode):

60µs to 480µs range: 20µs resolution

480µs to 1s range: 80µs resolution

1s to 65.535s range: 2ms resolution

Linear scale (no limit mode), log

scale, and thinned-out modes:

560µs (720µs at thinned-out mode)

to 1s range: 80µs resolution

1s to 65.535s range: 2ms resolution

Note: The following conditions must be set when

initial interval is less than 2ms.

•

Number of measurement channels: 1

•

Measurement ranging: fixed range

•

Stop condition: disable

Hold time:

Initial wait time: 0.03s to 655.35s,

100µs resolution

Sampling measurement stop condition:

1 2 3 4 5 6 7 8 9 10 11 12

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