Agilent 41501B SMU and Pulse Generator Expander
HPSMU (High Power SMU) Specifications
Voltage Range, Resolution, and Accuracy (HPSMU)
Voltage Set. Set. Meas. Meas. Max.
Range Reso. Accuracy Reso. Accuracy Current
± 2V 100µV ±(0.03%+900µV) 2µV ±(0.02%+700µV) 1A
± 20V 1mV ±(0.03%+4mV) 20µV ±(0.02%+2mV) 1A
± 40V 2mV ±(0.03%+7mV) 40µV ±(0.02%+3mV) 500mA
±100V 5mV ±(0.04%+15mV) 100µV ±(0.03%+5mV) 125mA
±200V 10mV ±(0.045%+30mV) 200µV ±(0.035%+10mV) 50mA
Current Range, Resolution, and Accuracy (HPSMU)
Current Set. Set. Meas. Meas. Max.
Range Reso. Accuracy Reso. Accuracy V
±1nA 100fA ±(0.5%+3pA+2fA×Vout) 10fA ±(0.5%+3pA+2fA×Vout) 200V
±10nA 1pA ±(0.5%+7pA+20fA
×Vout) 10fA ±(0.5%+5pA+20fA×Vout) 200V
±100nA 10pA ±(0.12%+50pA+200fA×Vout) 100fA ±(0.1%+30pA+200fA×Vout 200V
±1µA 100pA ±(0.12%+400pA+2pA
×Vout) 1pA ±(0.1%+200pA+2pA×Vout) 200V
±10µA 1nA ±(0.12%+5nA+20pA×Vout) 10pA ±(0.1%+3nA+20pA×Vout) 200V
±100µA 10nA ±(0.12%+40nA+200pA
×Vout) 100pA ±(0.1%+20nA+200pA×Vout 200V
±1mA 100nA ±(0.12%+500nA+2nA×Vout) 1nA ±(0.1%+300nA+2nA×Vout) 200V
±10mA 1µA ±(0.12%+4µA+20nA
×Vout) 10nA ±(0.1%+2µA+20nA×Vout) 200V
±100mA 10µA ±(0.12%+50µA+200nA×Vout) 100nA ±(0.1%+30µA+200nA×Vout) 1
±1A 100µA ±(0.5%+500µA+2µA×Vout) 1µA ±(0.5%+300µA+2µA×Vout) 2
1
200V (Iout £50mA), 100V (50mA<Iout£100mA)
2
200V (Iout £50mA), 100V (50mA<Iout£125mA), 40V (125mA<Iout£500mA), 20V (500mA<Iout£1mA)
Vout is the output voltage in volts. Iout is the output current in amps. For example, accuracy
specifications are given as ±% of set/measured value (0.1%) plus offset value (30pA+200fA
×Vout)
for the 100nA range. The offset value consists of a fixed part determined by the set/measurement
range and a proportional part that is multiplied by Vout.
Output terminal/connection:
Dual triaxial connectors, Kelvin
(remote sensing)
Voltage/Current Compliance
(Limiting):
Voltage: 0V to ±200V
Current: ±1pA to ±1A
Compliance Accuracy: Same as
the current (voltage) settling
accuracy.
HPSMU Supplemental
Information:
Maximum allowable cable
resistance when using Kelvin
connection:
Force: 0.7W (100mA to 1A)
Force: 10W (£100mA)
Sense: 10W
Typical voltage source output
resistance (Force line/non-Kelvin
connection): 0.2W
Voltage measurement input
resistance/current source output
resistance:
³10
13
W (1nA range)
Current compliance setting
accuracy foropposite polarity:
1nA to 10nA range: V/I setting
accuracy ±12% of range
100nA to 1A range: V/I setting
accuracy ±2.5% of range
-1000
-200
-100 -40 -20
-500
-50
-125
500
125
50
100 20 40
200
1000
HPSMU Measurement
and Output Range
Voltage (V)
Current (mA)
4
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