Hardware
Specification Condition
The “supplemental” information and
“typical” entries in the following specifi-
cations are not warranted, but provide
useful information about the functions
and performance of the instruments.
The measurement and output accuracy
are specified at the rear panel connec-
tor terminals when referenced to the
Zero Check terminal under the follow-
ing con-ditions:
1. 23° C ±5° C (double between 5° C to
18° C, and 28° C to 40° C if not noted
otherwise)
2. After 40 minutes warm-up
3. Ambient temperature change less
than ±1° C after auto calibration
execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU,
HPSMU, and GNDU)
7. Calibration period: 1 year
HRSMU (High Resolution SMU) Specifications
Voltage Range, Resolution, and Accuracy (HRSMU)
Voltage Set. Set. Meas. Meas. Max.
Range Reso. Accuracy Reso. Accuracy Current
±2V 100µV ±(0.02%+400µV) 2µV ±(0.01%+200µV) 100mA
±20V 1mV ±(0.02%+3mV) 20µV ±(0.01%+1mV) 100mA
±40V 2mV ±(0.025%+6mV) 40µV ±(0.015%+2mV)
1
±100V 5mV ±(0.03%+15mV) 100µV ±(0.02%+5mV)
2
1
100mA (Vout £20V), 50mA (20V<Vout£40V)
2
100mA (Vout £20V), 50mA (20V<Vout£40V), 20mA (40V<Vout£100V)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0 V to ±100 V
Current: ±100 fA to ±100 mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
Current Range, Resolution, and Accuracy (HRSMU)
Current Set. Set. Meas. Meas. Max.
Range Reso. Accuracy Reso. Accuracy V
±10pA 10fA ±(4%+400fA)
1, 2
1fA ±(4%+20fA+1fA×Vout/100)
1, 2
100V
±100pA 10fA ±(4%+400fA)
1, 2
1fA ±(4%+40fA+10fA×Vout/100)
1, 2
100V
±1nA 100fA ±(0.5%+0.7pA+1fA×Vout)
2
10fA ±(0.5%+0.4pA+1fA×Vout)
2
100V
±10nA 1pA ±(0.5%+4pA+10fA×Vout) 10fA ±(0.5%+2pA+10fA×Vout) 100V
±100nA 10pA ±(0.12%+40pA+100fA×Vout) 100fA ±(0.1%+20pA+100fA×Vout) 100V
±1µA 100pA ±(0.12%+400pA+1pA×Vout) 1pA ±(0.1%+200pA+1pA×Vout) 100V
±10µA 1nA ±(0.07%+4nA+10pA×Vout) 10pA ±(0.05%+2nA+10pA×Vout) 100V
±100µA 10nA ±(0.07%+40nA+100pA×Vout) 100pA ±(0.05%+20nA+100pA×Vout) 100V
±1mA 100nA ±(0.06%+400nA+1nA×Vout) 1nA ±(0.04%+200nA+1nA×Vout) 100V
±10mA 1µA ±(0.06%+4µA+10nA×Vout) 10nA ±(0.04%+2µA+10nA×Vout) 100V
±100mA 10µA ±(0.12%+40µA+100nA×Vout) 100nA ±(0.1%+20µA+100nA×Vout)
3
1
The accur acy is applicable when offset cancellation has been performed.
2
The offset current specification is multiplied by one of the following
factors depending upon the ambient temperature and humidity
(RH = Relative Humidity):
Humidity % RH
Temperature 5 - 60 60 - 80
5° C to 18° C ×2 ×2
18° C to 28° C ×1 ×2
28° C to 40° C ×2 ×5
3
100V (Iout£20mA) 40V (20mA<Iout£50mA) 20V (50mA<Iout£100mA)
Vout is the output voltage in volts. Iout is the output current in amps.
For example, accuracy specifications are given as ±% of set/measured
value (0.04%) plus offset value (200nA+1nA×Vout) for the 1mA range.
The offset value consists of a fixed part determined by the set/measure-
ment range and a proportional part that is multiplied by Vout or Vout/100.
HRSMU Supplemental Information:
Maximum allowable cable resistance
when using Kelvin connection (Force,
Sense): 10
W
Typical voltage source output
resistance (Force line/non-Kelvin
connection): 0.2
W
Voltage measurement input resistance/
current source output resistance:
³10
15
W (10 pA range)
Current compliance setting accuracy for
opposite polarity:
10 pA to 10 nA range: V/I setting
accuracy ±12% of range
100 nA to 100 mA range: V/I setting
accuracy ±2.5% of range
HRSMU Measurement
and Output Range
Agilent 4156C Precision Semiconductor Parameter Analyzer
100
50
20
-
100
-
40
-
20
-
20
-
50
-
100
20 40 100
Current (mA)
Voltage (V)
2
Output terminal/connection:
Dual triaxial connectors, Kelvin
(remote sensing)
(12 páginas)
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