Agilent Technologies E5500 Series Guia do Utilizador Página 148

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Scanner Maintenance and Calibration 8
Agilent 5500 SPM User’s Guide 148
the slow scanning axis so the range will be reduced as a time
consideration.
Only one Topography image is required for Y calibration. The other
image can be assigned to display flattened Topography data.
Y Non-Linearity
Obtain an image of the calibration target. Using the Cross-section tool,
set markers at the uppermost and bottommost feature along a vertical
cross section (Figure 101).
Figure 101 Cross-section in Y direction showing non-linearity
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