Pulse Range and Pulse Parameter (PGU)
10ms0 - 10s0.01s - 9.99s1s - 10s6
1ms0 - 1000ms1ms - 999ms100ms - 1000ms5
100µs
0 - 100ms0.1ms - 99.9ms10ms -100ms4
10µs
0 - 10ms0.01ms -9.99ms1ms - 10ms3
1µs0 - 1000µs1µs - 999µs100µs - 1000µs
2
0.1µs0 - 100µs1µs - 100µs2µs - 100µs
1
Set resolutionDelayWidthPeriod
Range
Note: Pulse width is defined when leading time is equal to trailing time. PGU2 must be set in
the same range as PGU1.
±(5% + 10ns)10µs
0.5ms - 10.0ms
±(5% + 10ns)1µs50µs - 1000µs
±(5% + 10ns)
100ns
5.0µs - 100.0µs
±(5% + 10ns)
10ns
0.5µs - 10µs
±(5% + 10ns)
1ns100ns - 1000ns
AccuracySet Restrictions
Range
Restrictions:
Pulse width < Pulse Period,
Delay time < Pulse period,
Leading time < Pulse width
×
0.8
Trailing time < (Pulse period - Pulse width)
×
0.8
Period, width, and delay of PGU1 and PGU2 must be in the same range. Leading time and
trailing time for a PGU must be in the same range.
Pulse parameter accuracy
Period: ±
(2% +2ns)
Width: ±
(3% +2ns)
Delay: ±(2% +40ns)
Transition time: ±(5% +10ns)
Trigger output
Level: TTL
Timing: Same timing and width as
PGU1 pulse output
PGU Supplemental Information:
Overshoot: ≤ ±5% of amplitude ±10mV
(50Ω output impedance to 50Ω load)
Pulse width jitter: 0.2% + 100ps
Pulse period jitter: 0.2% + 100ps
Maximum slew rate: 100V/µs
(50Ω output impedance to 50Ω load)
Noise: 0.2% of range (@ DC output)
MPSMU
Specifications
Same as 4155C MPSMU.
GNDU
(Ground Unit)
Specifications:
Output Voltage: 0V±100µV
Maximum sink current: 1.6A
Output terminal/connection:
Single triaxial connector,
Kelvin (remote sensing)
Output overshoot (typical, Filter: ON):
Voltage source: 0.03% of V range
Current source: 1% of I range
Range switching transient noise
(typical, Filter: ON):
Voltage ranging: 250mV
Current ranging: 10mV
Maximum slew rate: 0.2V/µs
Noise characteristics (typical,
Filter: ON):
Voltage source noise: 0.01% of V
range (rms)
Current source noise: 0.1% of I range
(rms)
Voltage monitor noise: 0.02% of V
range (p-p)
Current monitor noise: 0.2% of I
HRSMU, MPSMU,HPSMU
,
Supplemental Information
Maximum capacitive load: 1000pF
Maximum guard capacitance: 900pF
Maximum shield capacitance: 5000pF
Maximum guard offset voltage: ±1mV
Load Capacitance: ≤1µF
Cable resistance:
Force: ≤1Ω
Sense: ≤10Ω
GNDU Supplemental Information
Capacitance Calculation Accuracy (Supplemental Data)
Accuracy is derived from the current range, voltage range, capacitance measurement
and leakage current measurement integration times, and the guard capacitance of cabling
and step voltage. The information in the chart below is based on the following conditions:
Voltage Range: ± 20 V; Voltage Step: 100 mV; Guard Capacitance: 100 pF; Equivalent
parallel resistance of DUT: 1 x 10
15
W. The ratio of integration times for capacitance
measurement and leakage current measurement is 1:1.
HRSMU
Current Integration Measurement Resolution Accuracy
Range Time Range Reading % Offset
0.5sec 1pF 5fF 4.2 70fF
100pA 1sec 20pF 10fF 4.3 90fF
2sec 760pF 20fF 4.3 130fF
1nA 0.1sec 700pF 10fF 0.84 160fF
0.5sec 4.5nF 40fF 0.85 280fF
2sec 18nF 200fF 0.93 740fF
10nA 0.1sec 7nF 10fF 0.84 200fF
0.5sec 45nF 40fF 0.85 440fF
2sec 180nF 200fF 0.93 1.4pF
10sec 940nF 1pF 1.3 6.2pF
Current Integration Measurement Resolution Accuracy
Time Range Reading % Offset
0.1sec 700pF 10fF 0.91 170fF
1nA 0.5sec 4.5nF 40fF 0.94 340fF
2sec 18nF 200fF 1.0 1pF
0.1sec 7nF 10fF 0.91 180fF
10nA 0.5sec 45nF 40fF 0.94 480fF
2sec 180nF 200fF 1.0 1.6pF
10sec 940nF 1pF 1.6 7.6pF
Current complicance must be larger than the current range. The capacitance of
the DUT and measurement system must be smaller than the measurement range.
The measurement range might be reduced by the leakage current.
Capacitance Calculation Accuracy (Supplemental Data)
5
MPSMU
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