2
Hardware
3. Ambient temperature change less
than ± 1°C after auto calibration
execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU,
HPSMU, and GNDU)
7. Calibration period: 1 year
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal under the following
conditions:
1. 23°C ± 5°C (double between 5°C to
18°C, and 28°C to 40°C if not noted
otherwise)
2. After 40 minutes warm-up
Specification Condition
The “supplemental” information and
“typical” entries in the following specifi-
cations are not warranted, but provide
useful information about the functions
and performance of the instruments.
The measurement and output accuracy
Agilent 4156C Precision Semiconductor Parameter Analyzer
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to ±100V
Current: ±100fA to ±100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HRSMU Supplemental Informa-
tion :
Maximum allowable cable resistance
when using Kelvin connection (Force,
Sense): 10Ω
Typical voltage source output
resistance (Force line/non-Kelvin
connection): 0.2Ω
Voltage measurement input resistance/
current source output resistance:
≥10
15
Ω (10pA range)
Current compliance setting accuracy for
opposite polarity:
10pA to 10nA range: V/I setting
accuracy ± 12% of range
HRSMU (High Resolution SMU) Specifications
Voltage Range, Resolution, and Accuracy (HRSMU)
*2
±(0.02%+5mV)100µV±(0.03%+15mV)
5mV
± 100V
*1
±(0.015%+2mV)40µV
±(0.025%+6mV)2mV
± 40V
100mA
±(0.01%+1mV)20µV±(0.02%+3mV)
1mV
± 20V
100mA
±(0.01%+200µV)2µV±(0.02%+400µV)100µV± 2V
Max.
Current
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Voltage
Range
*1: 100mA (Vout 20V), 50mA (20V<Vout≤40V)
*2: 100mA (Vout 20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)
Current Range, Resolution, and Accuracy (HRSMU)
*3
±(0.1%+20µA+100nA×Vout)
100nA
±(0.12%+40µA+100nA×Vout)10µA±100mΑ
100V
±(0.04%+2µA+10nA×Vout)
10nA
±(0.06%+4µA+10nA×Vout)1µA±10mA
100V
±(0.04%+200nA+1nA×Vout)
1nA
±(0.06%+400nA+1nA×Vout)
100nA
±1mA
100V
±(0.05%+20nA+100pA×Vout)
100pA
±(0.07%+40nA+100pA×Vout)
10nA
±100µA
100V
±(0.05%+2nA+10pA×Vout)
10pA
±(0.07%+4nA+10pA×Vout)
1nA
±10µA
100V
±(0.1%+200pA+1pA×Vout)
1pA
±(0.12%+400pA+1pA×Vout)
100pA
±1µA
100V
±(0.1%+20pA+100fA×Vout)
100fA
±(0.12%+40pA+100fA×Vout)
10pA±100nA
100V
±(0.5%+2pA+10fA×Vout)
10fA
±(0.5%+4pA+10fA×Vout)
1pA±10nA
100V
±(0.5%+0.4pA+1fA×Vout)
*2
10fA
±(0.5%+0.7pA+1fA×Vout)
*2
100fA±1nA
100V
±(4%+40fA+10fA×Vout/100)
*1*2
1fA±(4%+400fA)
*1*2
10fA±100pA
100V
±(4%+20fA+1fA×Vout/100)
*1*2
1fA±(4%+400fA)
*1*2
10fA±10pA
Max.
V
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Current
Range
100nA to 100mA range: V/I setting
accuracy ± 2.5% of range
Output terminal/connection:
Dual triaxial connectors, Kelvin
(remote sensing)
*1: The accuracy is applicable when offset
cancellation has been performed.
*2: The offset current specification is
multiplied by one of the following factors
Current (mA)
Voltage (V)
100
20
50
HRSMU Measurement and
Output Range
-20
-50
-100
100
-100
-20-40 20 4
0
depending upon the ambient temperature
and humidity (RH = Relative Humidity):
×5×228°C to 40°C
×2×118°C to 28°C
×2×25°C to 18°C
60 - 80
5 - 60Temperature
RHHumidity %
*3: 100V (Iout 20mA)
40V (20mA<Iout≤50mA)
20V (50mA<Iout≤100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.04%)
plus offset value (200nA+1nA×Vout) for the
1mA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout or Vout/100.
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