Agilent Technologies B2201A Manual de Serviço

Agilent Technologies Agilent B1500A Semiconductor Device AnalyzerSelf-paced Training Manual

Required Devices for Class ExercisesTo perform the class exercises, you need the device set (Agilent part number 04156-87001) which contains the follo

Module 13SPGU Control and Applications13-14Pulse Setup ParametersPulse Generator ModePulse periodPulse widthLeading timeTrailing time90 %10 %Pulse pea

Module 13SPGU Control and Applications13-15Pulse output example:Pulse periodPulse Generator Mode2. SPGU Pulse Setup window3. Pulse setup parametersTo

Module 13SPGU Control and Applications13-163-Level Pulses• Every channel can output 3-level pulse80 Vp-p within +/-40 V window (at open load)• Pulse w

Module 13SPGU Control and Applications13-17pn+n+SourceDrainGateSubstrateIcpSMUSMUPGUorOxideAACharge PumpingCharge pumping is a type of hot carrier mea

Module 13SPGU Control and Applications13-18Three Methods of Charge PumpingGate WaveformsTimeVoltageSquare PulseTriangle PulseTrapezoidal PulseCharge P

Module 13SPGU Control and Applications13-19StartCalculates Vbase& Sets meas. parametersto I_sub sampling testI_sub sampling meas.by applying Vg pu

Module 13SPGU Control and Applications13-20Class ExerciseSquare Pulse Charge Pumping1. Recall the Charge Pumping 4T 0.1V step test record.2. Connect t

Module 13SPGU Control and Applications13-211: Substrate2: Source3: Gate4: DrainGSDSub123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5

Module 13SPGU Control and Applications13-22Measurement Result ExampleHere we see the result of plotting Icp vs pulse base voltage.

Module 13SPGU Control and Applications13-23Basic Flash memory Cell Structure DrainSourceControl gateFloating nodeBulk VCGC1VdC2C3C0VCGIdVoltage for Wr

Required Accessories for Class ExercisesTo perform the class exercises, you need the following accessories. Prepare the accessories shown below.Design

Module 13SPGU Control and Applications13-24Cycles100101105104103102106Write/ProgramEraseVth (V)(*1) Id(on) and Id(off) are measured as well. (*2) Id(o

Module 13SPGU Control and Applications13-25GateDrainSourceSubSPGUSPGU outputNOR Cell TestPulse switch for drain open3-level pulse by each channel40V-4

Module 13SPGU Control and Applications13-26Flash Memory – Endurance TestNOR Write ConnectionSMU3MechMechSelector or ASU ch2GateDrainSourceSMU1Substrat

Module 13SPGU Control and Applications13-27Flash Memory – Endurance TestNOR Erase ConnectionSMU3MechMechGateDrainSourceSMU1SubstrateSMU4PG4SolidStateM

Module 13SPGU Control and Applications13-28Flash Memory – Endurance TestMeasure Vth ConnectionSMU3MechMechGateDrainSourceSMU1SubstrateSMU4PG4SolidStat

Module 13SPGU Control and Applications13-29Class ExerciseFlash Memory Endurance Test1. Recall the Demo-S-NorFlash Endurance test record.2. Connect the

Module 13SPGU Control and Applications13-301: Substrate2: Source3: Gate4: DrainGSDSub123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5

Module 13SPGU Control and Applications13-31Demo-S-NorFlash Endurance Test SetupFor the instrument connection shown in the previous pages, change the v

Module 13SPGU Control and Applications13-32Measurement Result ExampleWriteEraseThis is a test result example displayed on the Data Display window.

Module 13SPGU Control and Applications13-33Pattern 1 Pattern 2 Pattern NΔt50 nsMust be < (1,024 - # of Patterns) points for each channelSmooth Tran

To perform the flash memory class exercise in Module 13 and if you use the ASU, you need the following accessories.To perform the flash memory class e

Module 13SPGU Control and Applications13-34ALWG ModeThis button opens the Pattern Editor used to define the arbitrary linear waveform.Open1. SPGU ALWG

Module 13SPGU Control and Applications13-35ALWG ModeA pattern can be defined by specifying the differential time and the absolute voltage. You can de

Module 13SPGU Control and Applications13-36Class ExerciseMonitor ALWG output by the sampling measurement.1. Click I/V-t Sampling icon and open setup e

Module 13SPGU Control and Applications13-371 23 456789101112131415161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGUPG1 Jum

Module 13SPGU Control and Applications13-38Measurement Result ExampleThis is a test result example displayed on the Data Display window for the “ALWG

ContentsContents-1Module 1. Introduction• New Features• EasyEXPERT• To Perform Easy Application Test• User Interface• Modular Mainframe• SCUU/GSWU• AS

ContentsContents-2Module 3. Data Display and Management• Data Display window• Graph Analysis Tools• Data Status• To Change Graph/List/Display Setup• T

ContentsContents-3Module 5. Basic Measurement• SMU Fundamentals• Classic Test Environment• SMUs Connected in Series or Parallel• Cabling and Fixture I

ContentsContents-4Module 7. Measurement Functions• SMU Pulsed Sweep Measurement• I/V-t Sampling Measurement• Negative Hold Time for High Speed Samplin

ContentsContents-5Module 9. Modifying Application Test Definitions• To Open Application Test Definition • To Modify Test Definition • To Use Debug Too

ContentsContents-6Module 11. Advanced Definitions and Operations• To Control External GPIB Devices• To Call Execution Files• To Perform Repeat Measure

ContentsContents-7Module 13. SPGU Control and Applications• High Voltage SPGU• SPGU Control• Pulse Generator Mode• Charge Pumping• Flash Memory Test•

Notices© Agilent Technologies 2005 - 2008No part of this manual may be reproduced in any form or by any means (including electronic storage and retrie

ContentsContents-8

10 Creating Your Test Definitions

Module 10Creating Your Test Definitions10-2In This Module• What is Test Definition• What is Test Contents• To Open Test Definition Editor• To Define T

Module 10Creating Your Test Definitions10-3What is Test DefinitionTest SpecificationTest OutputTest Contents•Test name•Test description•Variables•Entr

Module 10Creating Your Test Definitions10-4What is Test ContentsVariables•Device parameters•Test parametersVariables•Analysis parametersLocal variable

Module 10Creating Your Test Definitions10-5To Open Test Definition EditorDefine New Test…To start test definition, open the test definition editor.Sel

Module 10Creating Your Test Definitions10-6To Define Test SpecificationSet test informationDefine device parametersSet properties of parameterThe test

Module 10Creating Your Test Definitions10-7To Define Test SpecificationDefine test parametersSet properties of parameterIn the Test Parameters Definit

Module 10Creating Your Test Definitions10-8Setup exampleThis example sets:Category: Exercise (This category may be created by the class exercise in Mo

Module 10Creating Your Test Definitions10-9Primary Entry FieldSetup example - LayoutThe Define Layout dialog box is used to define the layout of the t

Module 10Creating Your Test Definitions10-10Result exampleThis is a result example of the test specification setup shown in the previous pages.

Module 10Creating Your Test Definitions10-11To Define Test Contents4. Select available element3. Specify the lineto insert elementor to be edited5. Cl

Module 10Creating Your Test Definitions10-12Available elementsProgram ComponentApplication TestAnalysisClassic TestMiscellaneousMy FavoriteAvailable e

Module 10Creating Your Test Definitions10-13Available variablesTest Specification•Device parameters•Test parametersTest Output•Analysis parametersYou

Module 10Creating Your Test Definitions10-14Defining local variablesLocal Variables DefinitionAdd Numeric Variable button displays the Numeric Variabl

Module 10Creating Your Test Definitions10-15Editing test contents•Block Selection•Insert•Delete•Copy•Cut•Paste The Edit tab provides the following but

Module 10Creating Your Test Definitions10-16Debug menu•Run•Abort•Stop•Break•Inspect The Debug tab menu provides the following buttons:•Run button star

Module 10Creating Your Test Definitions10-17Class ExerciseCreate test definition and perform test.1. Open test definition editor.2. Define Test Specif

Module 10Creating Your Test Definitions10-18Test Definition ExamplevariablesUse IDVD and GMMAX in the Demo preset group (My Favorite Setup) for the te

Module 10Creating Your Test Definitions10-19Measurement Result ExampleThis is a test result example displayed on the Data Display window.

In This ManualThis document is the self-paced training manual to help you to understand what is Agilent B1500A, what functions the B1500A has, how to

Module 10Creating Your Test Definitions10-20To Define Test Output2. Define the analysis parameters3. Specify X axis and Y axis4. Select variables to l

Module 10Creating Your Test Definitions10-21To Define Test OutputAnalysis ParametersDefine Analysis Parameters…Define the analysis parameters as shown

Module 10Creating Your Test Definitions10-22To Define Test OutputDisplay ParametersThis example sets:X-Y Graph: ID-VG plot for Y1-X graph and GM-VG pl

11 Advanced Definitions and Operations

Module 11Advanced Definitions and Operations11-2In This Module• To Control External GPIB Devices• To Call Execution Files• To Perform Repeat Measureme

Module 11Advanced Definitions and Operations11-3To Control External GPIB DevicesMiscellaneous: GPIB I/OWrite String to send a string command to GPIB d

Module 11Advanced Definitions and Operations11-4To Control External GPIB DevicesAgilent B2200 control exampleTo send commandValue 1Value 2Value 3Value

Module 11Advanced Definitions and Operations11-5To Control External GPIB DevicesAgilent B2200 control exampleTo read dataProgramming image:*RST:ROUT:F

Module 11Advanced Definitions and Operations11-6To Call Execution FilesMiscellaneous: Command ExecutionSpecifies variables used to receive execution r

Module 11Advanced Definitions and Operations11-7To set Format field{I[,A][:F]}• I List data index. Or index of element. Integer.• [,A] Character le

• Module 11. Advanced Definitions and OperationsThis module explains how to control external GPIB devices, how to call an execution file, how to perfo

Module 11Advanced Definitions and Operations11-8ExerciseTry to improve your test definition as you want.• To Use Built-in Functions• To Use Read Out F

Module 11Advanced Definitions and Operations11-9To Perform Repeat MeasurementsIf Abort is clickedYesStart (Run)Start ProcedureNoIteration ProcedureFin

Module 11Advanced Definitions and Operations11-10Subsite move Test SetupSelectSpecify ProberType.Or specify driver for your prober in CustomProber.Sav

Module 11Advanced Definitions and Operations11-11To Use Subsite moveC:\Program Files\Agilent\B1500\EasyEXPC:\Program Files\Agilent\B1500\EasyEXPC:\Pro

Module 11Advanced Definitions and Operations11-12Prober Control Script• Prober information fileprober_info.ini• Start ProcedureStart_xxxx.exe• Iterati

Module 11Advanced Definitions and Operations11-13Start_xxxx.exe• Arguments: -a GPIB_address-l log_file_nameExample:–a GPIB0::5::INSTR –l C:\temp\prb.l

Module 11Advanced Definitions and Operations11-14Prober_info.ini[Prober]Address=GPIB::5::INSTR LogMode=TrueLogName=C:\temp\prb.log[Target]UseID=TrueS

Module 11Advanced Definitions and Operations11-15Iterator_xxxx.exe• Arguments: -a GPIB_address-l log_file_nameExample:–a GPIB0::5::INSTR –l C:\temp\pr

Module 11Advanced Definitions and Operations11-16Final_xxxx.exeStartEndChuck down• Arguments: -a GPIB_address-l log_file_nameExample:–a GPIB0::5::INST

Module 11Advanced Definitions and Operations11-17Subsite_xxxx.exeStartEndChuck downMoves to the next subsiteChuck upReturns responseYesProber error?Ye

Class Exercises Class exercises use the test setup listed below. The test setup data are only examples and included in the Demo.xpg file stored in the

Module 11Advanced Definitions and Operations11-18To Change Execution FlowASubsite ProcedureNoYesstatus=True ?Test ExecutionBMove to the 1stsubsiteIf y

12 Miscellaneous Operations

Module 12Miscellaneous Operations12-2In This Module• Function Status Indicators• Run Option• Automatic Data Export and Data Record• Calibration• Confi

Module 12Miscellaneous Operations12-3Function Status IndicatorsAutomatic data export OFFONMultiple data display OFFONONSMU zero offset cancel OFFONSta

Module 12Miscellaneous Operations12-4Run OptionSave Data button appears if the last test result data is in the memory when both Auto Export and Auto R

Module 12Miscellaneous Operations12-5Automatic Data Export and Data RecordThe automatic data export function and the automatic data record function ca

Module 12Miscellaneous Operations12-6Module Self CalibrationCalibrationThe Calibration window is opened by clicking the Calibration button. The Module

Module 12Miscellaneous Operations12-7SMU Zero Cancel123CalibrationThe SMU Zero Cancel screen is used to perform the SMU zero offset current measuremen

Module 12Miscellaneous Operations12-8CMU CalibrationCalibrationThe CMU Calibration screen is used to perform the measurement data correction of the mu

Module 12Miscellaneous Operations12-9Advanced Options for CMU CalibrationThis dialog box is opened by clicking the Advanced Options... button, and is

NOTE Demo.xpg fileDemo.xpg file is required to create the Demo preset group which contains the test setup data used by the class exercises. And it is

Module 12Miscellaneous Operations12-10Advanced Options for CMU CalibrationIntegration Time area defines the integration time used for measuring phase

Module 12Miscellaneous Operations12-11Advanced Options for CMU CalibrationReference Standard Values area provides the following entry fields used to s

Module 12Miscellaneous Operations12-12Main FrameConfigurationThe Configuration window is opened by clicking the Configuration button, and is used to d

Module 12Miscellaneous Operations12-13ModulesConfigurationThe Modules screen is used to perform self-test of modules.Slot: Slot number where the modul

Module 12Miscellaneous Operations12-14ASUConfigurationThe ASU screen is available if the B1500A installs the HRSMU connected to the ASU (Atto Sense/Sw

Module 12Miscellaneous Operations12-15Switching MatrixConfigurationThe Switching Matrix screen is used to establish the GPIB connection with Agilent B

Module 12Miscellaneous Operations12-16Extended ConfigurationConfigurationThis dialog box is opened by clicking the Extended Configuration button in th

Module 12Miscellaneous Operations12-17SMU/PG SelectorConfigurationThe SMU/PG Selector screen is used to specify the input connection and the channel c

Module 12Miscellaneous Operations12-18✓ Flash Memory Test✓ Transistor photomosSW1SW2SW3SW1SW216440A SelectorTo DUTTo DUTInput SMUInput SMUInput PGUInp

Module 12Miscellaneous Operations12-19Event LogConfigurationThe Event Log screen displays the event log.Date/Time: Displays date and time of the event

Test Setup for Class ExercisesThe Demo preset group contains the following test setup. The setup data are only examples for the class exercises. The f

Module 12Miscellaneous Operations12-20XSLT FiltersHighlight this lineClick this buttonThe XSLT (XSL-Transformation, eXtensible Stylesheet Language Tra

Module 12Miscellaneous Operations12-21To Enable System ControllerAgilent IO Library Connection ExpertTo control external GPIB devices, the B1500A must

Module 12Miscellaneous Operations12-22To Start Desktop EasyEXPERTDatabase Backup Creation WizardDatabase Restoration Wizard\Documents and Settings\All

Module 12Miscellaneous Operations12-23To Use 415x Setup File Converter4155/4156 setup file(file extension: MES or DAT)EasyEXPERT setup file(file exten

Module 12Miscellaneous Operations12-24To Use 415x Setup File Converter1. Drag and drop the shortcuts of the MES/DAT file on the shortcut of the Setup

Module 12Miscellaneous Operations12-25To Use 415x Setup File ConverterClick [Start] → All Programs → Agilent B1500A EasyEXPERT→ 4155,4156 Setup File C

Module 12Miscellaneous Operations12-26

13 SPGU Control and Applications

Module 13SPGU Control and Applications13-2In This Module• High Voltage SPGU• SPGU Control• Pulse Generator Mode• Charge Pumping• Flash Memory Test• AL

Module 13SPGU Control and Applications13-3High Voltage Semiconductor Pulse Generator Unitz 2 channels per modulez Output impedance: 50 ohmz Amplitude:

Trng List MOSFET Vth-gmmax measurement using I/V List SweepTrng Multi Multi Channel I/V Sweep (Bipolar transistor and LED)Trng Sampling 0.1 μF samplin

Module 13SPGU Control and Applications13-4Connect 16493Q cables to make synchronization of multiple SPGUs.Max. 5 Modules (10 output channels)LED to sh

Module 13SPGU Control and Applications13-5Pulse SwitchHigh Voltage SPGUEraseOPENGateDrainSMUSourceSMUSubstrateCLOSEWriteGateDrainSMUSourceSMUSubstrate

Module 13SPGU Control and Applications13-650+×=RdutRdutVsetVdutVset: Setting voltage with open loadOutput ImpedancePulse Source50 ΩRdutVsetVdutVHigh V

Module 13SPGU Control and Applications13-7Effects of Load ImpedanceSetup: 1V output, 50 Ω loadActual load: 1 MΩ Æ 2 V outputExpectedActualSetup: 1 V o

Module 13SPGU Control and Applications13-8BNC (m) connector:• To connector plate• To 16442A/B test fixture• To 16440A SMU/PGU selector• To E5288A ASU(

Module 13SPGU Control and Applications13-9SPGU ControlMode: VPULSE or ALWGCheck here to display the Percent of Progress vs. Time plot.Check here to di

Module 13SPGU Control and Applications13-10SPGU ControlSPGU Pulse SetupSPGU ControlButtons on Measurement Setup screen of a Classic TestIf the SPGU ou

Module 13SPGU Control and Applications13-11Pulse Switch SetupDefault setting of the switch is “CLOSE”SPGU ControlOPENPulse periodWriteEraseWidthDelay5

Module 13SPGU Control and Applications13-12Load Z SetupOutput ImpedanceSetting (default=50 ohm)SPGU Control50 ΩRdutVsetVdutVVset: Setting voltage with

Module 13SPGU Control and Applications13-13SPGU ControlSPGU ALWG SetupThis button opens the Define ALWG Waveform window used to define the ALWG output