Agilent Technologies 16440A Manual de Serviço

Agilent Technologies Agilent B1500ASemiconductor Device AnalyzerConfiguration and Connection Guide

1- 6 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationOptions of B1500A series1.2 Options of B1500A seriesThi

4- 12 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal deviceHigh resolution IV characteriz

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 13Connection and Ordering ExamplesFour terminal deviceTable 4-18 Configuration Example

4- 14 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal deviceHigh resolution IV characteriz

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 15Connection and Ordering ExamplesFour terminal deviceTable 4-21 Configuration Example

4- 16 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal deviceHigh power IV characterization

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 17Connection and Ordering ExamplesFour terminal deviceTable 4-24 Configuration Example

4- 18 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal device50 s Pulse IV characterizatio

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 19Connection and Ordering ExamplesFour terminal deviceTable 4-25 Target device and app

4- 20 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal device50 s Pulse IV characterizatio

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 21Connection and Ordering ExamplesFour terminal deviceTable 4-28 Target device and app

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 7B1500A Product ConfigurationOptions of B1500A seriesSelect add-on packages (optional)

4- 22 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal deviceFlash memory cell characteriza

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 23Connection and Ordering ExamplesFour terminal deviceTable 4-31 Target device and app

4- 24 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal deviceFlash memory cell characteriza

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 25Connection and Ordering ExamplesFour terminal deviceTable 4-34 Target device and app

4- 26 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesConfiguration example of WGFMU4.3 Configuration ex

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 27Connection and Ordering ExamplesConfiguration example of WGFMUTable 4-39 Configurati

4- 28 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesConfiguration example of WGFMU

1- 8 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationOptions of B1500A seriesB1500A-A30 Add-on package - WGF

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 9B1500A Product ConfigurationOptions of B1500A seriesB1500A-1CM Rack mount kit • Rack

1- 10 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationFurnished accessories1.3 Furnished accessoriesFurnishe

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 11B1500A Product ConfigurationFurnished accessories• Prober control program• sleep.exe

1- 12 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationFurnished accessoriesTable 1-5 B1500A-A01 Standard Pac

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 13B1500A Product ConfigurationFurnished accessoriesTable 1-9 B1500A-A10 Add-on Package

1- 14 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationFurnished accessoriesTable 1-11 B1500A-A17 Add-on Pack

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 15B1500A Product ConfigurationFurnished accessoriesTable 1-14 B1500A-A20 Add-on Packag

Notices© Agilent Technologies, Inc. 2005-2013No part of this manual may be reproduced in any form or by any means (including electronic storage and re

1- 16 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationFurnished accessoriesTable 1-16 B1500A-A28 Add-on Pack

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 17B1500A Product ConfigurationFurnished accessoriesTable 1-18 B1500A-A30 Add-on Packag

1- 18 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationFurnished accessoriesTable 1-20 B1500A-A3P Add-on Pack

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 19B1500A Product ConfigurationFurnished accessoriesTable 1-21 B1500A-A5F Add-on Packag

1- 20 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationUpgrade products for the B1500A series1.4 Upgrade prod

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 21B1500A Product ConfigurationUpgrade products for the B1500A seriesB1500AU-089 Additi

1- 22 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationUpgrade products for the B1500A seriesB1500AU-W03 5m C

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 23B1500A Product ConfigurationUpgrade products for the B1500A seriesTable 1-23 Additio

1- 24 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationUpgrade products for the B1500A series1.4.2 About Plug

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 25B1500A Product ConfigurationUpgrade products for the B1500A series1.4.3 Module type

Contents Agilent B1500A Configuration and Connection Guide, Edition 5 Contents - 11. B1500A Product ConfigurationProduct line up of the B1500A series

1- 26 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationUpgrade products for the B1500A series1.4.4 Maximum Mo

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 27B1500A Product ConfigurationEasyEXPERT and Desktop EasyEXPERT software1.5 EasyEXPERT

1- 28 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationEasyEXPERT and Desktop EasyEXPERT software• Quick test

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 29B1500A Product ConfigurationEasyEXPERT and Desktop EasyEXPERT softwareWorkspace and

1- 30 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationEasyEXPERT and Desktop EasyEXPERT software1.5.2 Deskto

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 31B1500A Product ConfigurationEasyEXPERT and Desktop EasyEXPERT software1.5.3 System r

1- 32 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationEasyEXPERT and Desktop EasyEXPERT software1.5.4 Licens

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 33B1500A Product ConfigurationEasyEXPERT and Desktop EasyEXPERT softwareNOTE How to ge

1- 34 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationB1542A Pulsed IV package for B1500A1.6 B1542A Pulsed I

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 35B1500A Product ConfigurationB1542A Pulsed IV package for B1500AThe B1542A does not c

Contents - 2 Agilent B1500A Configuration and Connection Guide, Edition 5ContentsSMU connections. . . . . . . . . . . . . . . . . . . . . . . . . . .

1- 36 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationB1542A Pulsed IV package for B1500AThe B1542A supports

2 B1500A Accessories

2-2 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500A2.1 Accessories for the B1500AThis section

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 3B1500A AccessoriesAccessories for the B1500AWARNING There are potentially hazardous

2-4 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500ACAUTION The GNDU can sink current of up to

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 5B1500A AccessoriesAccessories for the B1500ANOTE Before connecting accessories to MF

2-6 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500A2.1.3 HVSPGU accessories• SPGU cables - ha

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 7B1500A AccessoriesAccessories for the B1500ANOTE Connect the Ref Out/In, Sync Out/In

2-8 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500A2.1.4 WGFMU accessories• WGFMU-to-RSU cabl

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 9B1500A AccessoriesAccessories for the B1500ACAUTION The B1500A must be turned off be

1 B1500A Product Configuration

2-10 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500A2.1.5 Test fixture Agilent 16442B test fi

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 11B1500A AccessoriesAccessories for the B1500A16442B-800 Extra blank PTFE board16442B

2-12 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500A2.1.6 Other accessories and interlockThe

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 13B1500A AccessoriesAccessories for the B1500ATable 2-7 Adapter and connectorsModel/O

2-14 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500AN1254A-101 Triaxial (m) to Coaxial (f) ad

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 15B1500A AccessoriesAccessories for the B1500AN1254A-302 Mini banana - pin plug (red,

2-16 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the B1500AN1254A-505 HVSMU triaxial cable assy 1.5

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 17B1500A AccessoriesAccessories for the B1500A2.1.7 Rack mount kit for Agilent standa

2-18 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the wafer prober / connector plate2.2 Accessories f

Agilent B1500A Configuration and Connection Guide, Edition 5 2- 19B1500A AccessoriesAccessories for the wafer prober / connector plateTable 2-10 Item

1- 2 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationProduct line up of the B1500A series1.1 Product line up

2-20 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A AccessoriesAccessories for the wafer prober / connector plateTable 2-13 Item n

3 Connection Guide for Wafer Prober

3- 2 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberSMU/GNDU connection with prober3.1 SMU/GNDU connec

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 3Connection Guide for Wafer ProberSMU/GNDU connection with prober3.1.1 GNDU connection

3- 4 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberSMU/GNDU connection with proberKelvin connectionCo

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 5Connection Guide for Wafer ProberSMU/GNDU connection with prober3.1.2 SMU connections

3- 6 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberSMU/GNDU connection with proberTable 3-4 Item numb

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 7Connection Guide for Wafer ProberSMU/GNDU connection with proberKelvin to non-Kelvin

3- 8 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberSMU/GNDU connection with prober3.1.3 MCSMU connect

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 9Connection Guide for Wafer ProberSMU/GNDU connection with proberFigure 3-9 MCSMU Outp

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 3B1500A Product ConfigurationProduct line up of the B1500A series• MCSMU module (B1500

3- 10 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberSMU/GNDU connection with proberFigure 3-10 N1255A

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 11Connection Guide for Wafer ProberSMU/GNDU connection with proberNOTE Series Resistor

3- 12 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberConnection for low current measurement3.2 Connect

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 13Connection Guide for Wafer ProberConnection for low current measurementFigure 3-13 G

3- 14 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberConnection for low resistance measurement3.3 Conn

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 15Connection Guide for Wafer ProberConnection for low resistance measurementFigure 3-1

3- 16 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberSCUU and ASU3.4 SCUU and ASUThis section describe

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 17Connection Guide for Wafer ProberSCUU and ASU3.4.2 ASU connectionEach ASU has one D-

3- 18 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberSCUU and ASUNOTE About ASU output cablesTo perfor

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 19Connection Guide for Wafer ProberWGFMU and RSU3.5 WGFMU and RSUThis section covers t

1- 4 Agilent B1500A Configuration and Connection Guide, Edition 5B1500A Product ConfigurationProduct line up of the B1500A series• N1302A-200 GSWUGu

3- 20 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberWGFMU and RSU• Magnet stand (16493R-802), 1 ea. p

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 21Connection Guide for Wafer ProberWGFMU and RSU3.5.2 Connecting RF ProbesThe RF measu

3- 22 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberWGFMU and RSUThe following instructions apply whe

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 23Connection Guide for Wafer ProberWGFMU and RSU• Connect other SMA-SMA cable between

3- 24 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberWGFMU and RSU3.5.3 Connecting DC ProbesThe MOSFET

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 25Connection Guide for Wafer ProberWGFMU and RSUThese instructions apply when DC probe

3- 26 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberInterlock circuit3.6 Interlock circuitThe interlo

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 27Connection Guide for Wafer ProberInterlock circuit4. Use wire to connect the two swi

3- 28 Agilent B1500A Configuration and Connection Guide, Edition 5Connection Guide for Wafer ProberInterlock circuitFigure 3-31 Dimensions of the In

4 Connection and Ordering Examples

Agilent B1500A Configuration and Connection Guide, Edition 5 1- 5B1500A Product ConfigurationProduct line up of the B1500A seriesFigure 1-1 B1500A Rea

4- 2 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesTwo terminal device4.1 Two terminal deviceThis chap

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 3Connection and Ordering ExamplesTwo terminal deviceTable 4-3 Configuration ExampleMod

4- 4 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesTwo terminal deviceGeneral IV/CV characterization F

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 5Connection and Ordering ExamplesTwo terminal deviceTable 4-6 Configuration ExampleMod

4- 6 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesTwo terminal deviceHigh resolution IV characterizat

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 7Connection and Ordering ExamplesTwo terminal deviceTable 4-9 Configuration ExampleNOT

4- 8 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal device4.2 Four terminal deviceThis ch

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 9Connection and Ordering ExamplesFour terminal deviceTable 4-11 Key specificationTable

4- 10 Agilent B1500A Configuration and Connection Guide, Edition 5Connection and Ordering ExamplesFour terminal deviceGeneral IV/CV characterization

Agilent B1500A Configuration and Connection Guide, Edition 5 4- 11Connection and Ordering ExamplesFour terminal deviceTable 4-14 Key specificationTabl