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4-42 Agilent 4155C/4156C User’s Guide Vol.2, Edition 6
Quasi-static C-V Measurements
Considering Measurement Accuracy
Figure 4-14 Calculation Example of Measurement Accuracy: HRSMU
Conditions:
Measurement Range: 10 nA
Output Range: 2 V
Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.03 s corresponding to the lines from top
to bottom
Equivalent Parallel Resistance of DUT: 10 T ohm
Guard Capacitance of Measurement Path: 200 pF
1.E-14
1.E-13
1.E-12
1.E-11
1.E-10
1.E-09
0.001 0.01 0.1 1
QSCV Measurement Voltage (V)
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0.001 0.01 0.1 1
QSCV Measurement Voltage (V)
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- Agilent 4155C 1
- Agilent 4156C 1
- Manual Part Number 2
- Warranty 2
- Technol o gy Licenses 2
- Restricted Rights Legend 2
- Safety Summary 5
- Safety Symbols 7
- In This Manual 8
- Contents 10
- 1 Sweep Measurements 19
- Basic Sweep Measurement 22
- Pulse Sweep Measurement 29
- VNAME and INAME 35
- To Set up Primary Sweep 36
- To Set up Secondary Sweep 37
- To Set up Synchronous Sweep 38
- To Set up SMU Pulsed Output 40
- Pulse Parameters 41
- 16442A/B 49
- Kelvin Triaxial Cables 49
- Coaxial Cables 49
- Interlock/LED Cable 49
- Triaxial Cables 50
- Sweep Measurements 54
- Figure 1-8 Sweep Setup Screen 58
- 2 Knob Sweep Measurements 63
- KNOB SWEEP screen 70
- To Use User Function 71
- Executing Measurements 72
- To Execute Measurements 74
- To Stop Measurement 75
- To copy knob sweep setups 77
- Knob Sweep Measurements 78
- 3 Sampling Measurements 79
- Sampling Measurement Data 85
- Hold Time 86
- Sampling Interval 86
- Meas.time 86
- Sampling Completion 87
- Val of EVENT 88
- Linear Sampling Measurement 91
- Example Operation 94
- TOTAL SAMP.TIME 96
- @TIME Value 98
- Parameters 100
- INITIAL INTERVAL 101
- NO.OF SAMPLES 101
- HOLD TIME 101
- To Define Measurement Units 104
- To Set up Constant Output 107
- To Set up PGU Output 108
- To Define Stop Conditions 110
- To Display Graphics Results 111
- To Display List Results 112
- Charge Voltage 114
- Chan front-panel key 115
- Sampling Measurements 120
- Making a Measurement 120
- Measurement Functions 123
- Operation 124
- NOTE Integration Time 127
- To Set up QSCV Sweep Source 131
- To Set up Stop Condition 132
- measurement 134
- Maximum Measurement Value 146
- Quasi-static C-V Measurements 147
- 0.01 0.1 1 10 161
- QSCV Measurement Voltage (V) 161
- 5Stress Force 175
- Stress Function 177
- Stress Output Channels 178
- External Stress Source 179
- Stress Mode 180
- Stress Force Sequence 181
- Delay time of PGUs 182
- Example 182
- Abnormal Status 184
- Defining Stress Conditions 185
- To disable a unit 187
- To set hold time 190
- To Set up ac (Pulse) Output 191
- Delay time 192
- To Set up dc Output 193
- To Force Stress 194
- Stress Force 196
- Analysis Function 199
- Moving the marker 201
- Line Drawing 205
- Scaling Functions 207
- Overlay Display Function 208
- Automatic Analysis Function 208
- Manual Analysis 209
- To turn off markers 210
- To move marker fast 210
- To Display or Move Cursor 214
- Automatically 215
- To Zoom the Display Range 215
- Gradient 218
- To Display and Select a Line 224
- To Display Grid on the Graph 224
- To Scroll the LIST screen 230
- To turn off marker 231
- Automatic Analysis 233
- Display front-panel key 234
- • “QSCV Zero Offset Cancel” 246
- Measurement Units 247
- SMU - Source Monitor Unit 248
- Type of SMUs 249
- HRSMU - High Resolution SMU 250
- MPSMU - Medium Power SMU 253
- HPSMU - High Power SMU 256
- SMU Pulse Output 259
- VSU - Voltage Source Unit 261
- VMU - Voltage Monitor Unit 262
- PGU - Pulse Generator Unit 264
- Output Impedance 265
- Pulse Count 265
- Trigger Output 266
- Compliance 267
- Power Compliance 271
- Measurement Ranging Mode 273
- Auto Ranging 274
- Limited Auto Ranging 275
- Compliance Range 276
- Fixed Range 276
- Measurement Time 278
- Medium front-panel key 279
- Overhead Time 281
- To Specify Source Output Time 281
- SMU Filter 282
- Self-calibration 283
- Zero Offset Cancel 284
- To Perform Offset Cancel 286
- QSCV Zero Offset Cancel 287
- Operation States 290
- Stress Force State 291
- Standby State 291
- Output Sequence 293
- Sequential Mode 294
- Simultaneous Mode 296
- Measurement Sequence 298
- 8 Support Functions 299
- Output or Measurement Data 301
- Output data of PGU 302
- User Function 303
- User Variable 304
- 10 ASSIGN @Hp4155 TO 800 305
- Syntax of Data Variable Name 306
- Expression 307
- Standby Function 311
- When Getting Setup File 314
- To Use Standby Function 315
- R-BOX Control 316
- Non-Kelvin Connections 317
- Kelvin Connections 317
- Circuit Diagram 319
- Support Functions 320
- To Use R-Box 321
- 16441A R-Box 322
- SMU/PG Selector Control 323
- Restrictions using Selector 324
- To Use Selector 325
- Switching Matrix Control 327
- To Control Functions 330
- To Control Connections 335
- To Use Matrix Setup File 339
- Trigger Function 340
- Single, Repeat, or Append) 341
- Trigger Input 342
- 9 Built-in Functions 347
- Built-in Function 349
- Read Out Function 358
- Using Test Fixture 373
- Substrate 374
- Using Connector Plate 375
- To Measure Low Resistance 377
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